Introduction to Vacuum
• What is vacuum ?
– The official definition is: “Low Pressure”
– Since “Low” is a relative term, “Low Pressure” is relative to atmospheric pressure.
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Dr. G. Mirjalili, Physics Dept. Yazd University
Vacuum techniques
Introduction
Dr. G. Mirjalili
Physics Dept. Yazd University
Dr. G. Mirjalili, Physics Dept. Yazd University
Introduction to Vacuum
• What is vacuum ?
– The official definition is: “Low
Pressure”
– Since “Low” is a relative term, “Low
Pressure” is relative to atmospheric
pressure.
• So . . . what is pressure?
– Pressure is “Force per unit area”.
• pounds/square inch
• newtons/square meter
• (example: hand in sand)
Dr. G. Mirjalili, Physics Dept. Yazd University
Introduction to Vacuum
• The pressure exerted by a gas in a
closed, rigid container is caused by the
gas molecules striking the surface of
the chamber.
– Gas: form of matter where the molecules
can freely move in any direction, and it
expands to fill its container
• It is a combination of two factors:
1. how many gas molecules are in the
chamber (molecular density), and
2. the kinetic energy (heat) of the gas
molecules
Dr. G. Mirjalili, Physics Dept. Yazd University
Introduction to Vacuum
• Therefore a vacuum (low pressure)
can be created by:
– reducing the number of gas
molecules in the chamber (pumping),
or
– reducing the kinetic energy
(temperature) of the gas molecules
Dr. G. Mirjalili, Physics Dept. Yazd University
Introduction to Vacuum
• Atmospheric Pressure:
– The earth is surrounded by an atmosphere consisting mainly of
nitrogen and oxygen.
– The force exerted by the atmosphere is 14.7 pounds per square
inch at the surface of the earth (at sea level, 45O latitude, 0OC).
– The 14.7 pounds
(force) is the effect of
the weight of the
molecules in the air
column above a one
inch square of the
earth’s surface
extending to edge of
the earth’s
atmosphere.
– Why is the
atmospheric pressure
lower as you go higher
in elevation?
Dr. G. Mirjalili, Physics Dept. Yazd University
Introduction to Vacuum
• Atmospheric Pressure:
– altitude and atmospheric pressure are related with the
following formula:
– where P is in pounds per square inch (PSIA)
– where A is the altitude above sea level in meters
– The atmospheric pressure in a place
(elevation 866 meters
above sea level) is about 13.1 psia.
– On top of Mt. Everest (8850m),
the pressure is 4.3 psia,
less than 1/3 of sea level!.
17000107.14 AP −×=
Atmospheric Pressure vs. Altitude
0.0
2.0
4.0
6.0
8.0
10.0
12.0
14.0
16.0
0 2000 4000 6000 8000 10000
Altitude in meters above sea level
PS
IA
Dr. G. Mirjalili, Physics Dept. Yazd University
Dr. G. Mirjalili, Physics Dept. Yazd University
Introduction to Vacuum
• Net Pressure:
– Molecules of air continuously striking the walls
of a container exert a force on the walls.
– If the container is open, then:
• the force inside = the force outside
• there is no “net pressure” on the chamber
walls.
– If the chamber is closed, and some of the gas
inside is removed (pumped out), there will a be
a net force pushing inwards on the walls of the
container.
• If the net force is greater than the
mechanical strength of the container, there
will be an implosion.
Dr. G. Mirjalili, Physics Dept. Yazd University
Introduction to Vacuum
• Net Pressure:
– Collapsed rail car due to condensing steam.
•
Dr. G. Mirjalili, Physics Dept. Yazd University
Introduction to Vacuum
• What is an ideal (perfect) vacuum ?
– A space containing nothing
– Pressure = 0 psia
– Does this exist ?
• Practically, no
• Deep space is a close approximation ( <
10-20 psia)
– What are some reasons why this does not
exist in the practical world?
• An actual vacuum is any pressure below
atmospheric pressure.
Dr. G. Mirjalili, Physics Dept. Yazd University
Short History of Vacuum
• Evangelista
Torricelli -
1643
– developed a
suction pump
to remove
water from a
well
– developed
the first
crude
barometer
– pressure unit
(torr) is
named after
him
Dr. G. Mirjalili, Physics Dept. Yazd University
Short History of Vacuum
• Short history: Otto von Guericke - 1663
– invented a piston vacuum pump
– Magdeburg hemispheres demonstration:
• two bronze
hemispheres
were put
together, the air
was pumped
out, and two
teams of horses
could not pull
them apart
• impressed the
socks off the
emperor!
Dr. G. Mirjalili, Physics Dept. Yazd University
Short History of Vacuum
• Edison - 1879
– used vacuum in his first electric lamp
• early 1900’s
– continued development of vacuum pumps
and gauges to support new vacuum tube
technology
• 1950’s
– development of diffusion pump, ion pump,
and ion gauge opened the door to high and
ultra-high vacuum: < 10-6 torr
• 1970’s
– turbomolecular pump and cryo pumps
invented
Dr. G. Mirjalili, Physics Dept. Yazd University
Why is a Vacuum Needed?
To move a particle in a (straight) line over a large distance
1:
Dr. G. Mirjalili, Physics Dept. Yazd University
Why is a Vacuum Needed?
Contamination
(usually water) Clean surface
Atmosphere (High)Vacuum
To provide a clean surface2:
Dr. G. Mirjalili, Physics Dept. Yazd University
Why Use Vacuum?
• Cleanliness: low pressure => low
number of molecules of potential
contaminants
– extend formation time for native oxides
– reduce or eliminate impurities incorporated
during processing
• Plasma generation: plasmas can easily
be created and sustained in a low
pressure environment
– used for etching, deposition, and ion
implantation
• Lower molecular interference:
– increase mean free path for ions used in
sputtering
Dr. G. Mirjalili, Physics Dept. Yazd University
Why Use Vacuum?
• Low friction:
– reduce heat dissipation requirements for
processes.
• Thermal insulation:
– i.e. thermos bottle
• Promote evaporation:
– materials can be evaporated at lower
temperatures by reducing the pressure
• Mechanical advantage:
– use pressure differences to hold items in
place or to transport them from one place to
another
Dr. G. Mirjalili, Physics Dept. Yazd University
Uses for Vacuum: Non-
Semiconductor
• freeze drying of foods and
pharmaceutical products
• optical lens coatings
• vacuum storage to retard spoilage or
oxidation (rust)
• vacuum tubes and cathode ray tubes
• vacuum cleaners
• mechanical advantage:
– suction cups
– transport (bank drive-up window)
Dr. G. Mirjalili, Physics Dept. Yazd University
Uses for Vacuum: Semiconductor
• Layering (CVD, sputter, evaporation)
– reduce impurities
– allow plasma generation
– increase mean free path
• Dry etching
– plasma etching or Reactive Ion Etching
• Ion implantation (doping)
• Vacuum clamping (chucks, wands, robot
arms) used to manipulate wafers by
touching backside only.
– Used in virtually all process tools
Dr. G. Mirjalili, Physics Dept. Yazd University
Pressure Measurement
Dr. G. Mirjalili, Physics Dept. Yazd University
BAROMETER
WATER MERCURY
760
mm
Mercury: 13.58 times
heavier than water:
Column is 13.58 x shorter :
10321 mm/13.58=760 mm
(= 760 Torr)
10.321
mm
29,9
in
Dr. G. Mirjalili, Physics Dept. Yazd University
Pressure Measurement
• Barometer:
– Torricelli placed a
glass tube that was
sealed at one end in
a beaker of mercury
(Hg).
– The level of Hg in the
tube went up and
down as the
surrounding pressure
was changed.
– At sea level, the
atmospheric pressure
will support a column
of Hg 760mm high.
– 1 torr = 1 mm Hg =
1/760 atmospheric
pressure
Dr. G. Mirjalili, Physics Dept. Yazd University
Pressure of 1 standard atmosphere
AT SEA LEVEL, 0O C AND 45O LATITUDE
CGS →P=dyne/cm2=bar
P=ρgh=13.6×98×76=1012928bar≈10 6bar ≈ 1013
mbar
MKS →P=N/m2 =pascal
P=13600 ×9.8 ×.76=101292.8 ≈105 pascal
100 pascal=1 mbar=.76 Torr
Dr. G. Mirjalili, Physics Dept. Yazd University
Pressure Equivalents
Atmospheric Pressure (Standard) =
0
14.7
29.9
760
760
760,000
101,325
1.013
1013
gauge pressure (psig)
pounds per square inch (psia)
inches of mercury
millimeter of mercury
torr
millitorr or microns
pascal
bar
millibar
Dr. G. Mirjalili, Physics Dept. Yazd University
THE ATMOSPHERE IS A MIXTURE OF GASES
PARTIAL PRESSURES OF GASES CORRESPOND TO THEIR RELATIVE VOLUMES
GAS SYMBOL
PERCENT BY
VOLUME
PARTIAL PRESSURE
TORR PASCAL
Nitrogen
Oxygen
Argon
Carbon Dioxide
Neon
Helium
Krypton
Hydrogen
Xenon
Water
N2
O2
A
CO2
Ne
He
Kr
H2
X
H2O
78
21
0.93
0.03
0.0018
0.0005
0.0001
0.00005
0.0000087
Variable
593
158
7.1
0.25
1.4 x 10-2
4.0 x 10-3
8.7 x 10-4
4.0 x 10-4
6.6 x 10-5
5 to 50
79,000
21,000
940
33
1.8
5.3 x 10-1
1.1 x 10-1
5.1 x 10-2
8.7 x 10-3
665 to 6650
Dr. G. Mirjalili, Physics Dept. Yazd University
Vapor pressure of water at various
temperatures
T (O C)
100
25
0
-40
-78.5
-196
P (mbar)
1013
32
6.4
0.13
6.6 x 10 -4
10 -24
(BOILING)
(FREEZING)
(DRY ICE)
(LIQUID NITROGEN)
Dr. G. Mirjalili, Physics Dept. Yazd University
Pressure Measurement
• Other units of pressure:
– inches of water, pascals, bar, atmospheres, and
pounds per square inch.
– Pascals and Bar are used in Europe
– In the U.S. (and in this class) we mostly use torr
written using scientific notation.
• i.e. 5 x 10-6 torr, etc.
• Important conversion, atmospheric pressure:
– 1 atm. = 760 torr = 760 mm Hg = 406.8 in. H2O =
14.7 pounds/in2 = 1.013 bar = 101,325 Pa
• Note: Potential confusing terminology!
– High vacuum = low pressure
– Low vacuum = high pressure (relatively)
Dr. G. Mirjalili, Physics Dept. Yazd University
Pressure Measurement
• Vacuum Ranges: (depends on source)
• Does the risk of implosion increase significantly as you
move from low vacuum to ultra-high vacuum?
• Which vacuum range(s) would a barometer be useful for?
10-14 10-12 10-10 10-8 10-6 10-4 10-2 100 102 103
Pressure (Torr)
103 105 107 109 1011 1013 1015 1017 1019
Density in molecules per cubic cm (at 25 OC)
109 107 105 103 101 10-1 10-3 10-5 10-7
Mean Free Path in meters (at 25 OC)
High Vacuum Medium
Vacuum
Rough
Vacuum
Ultra-High Vacuum
Atm
Dr. G. Mirjalili, Physics Dept. Yazd University
Vacuum Ranges
• Low (rough) Vacuum:
– atmosphere down to 1 torr,
– clamping, non-industrial
applications
• Medium Vacuum:
– 1 torr to 1 x 10-3 torr
– CVD, plasma etch
• High Vacuum:
– 1 x 10-3 to 1 x 10-8 torr
– ion implanters, sputterers,
evaporators
• Ultra-high Vacuum:
– less than 1 x 10-8 torr
– molecular beam epitaxy,
research instruments
Dr. G. Mirjalili, Physics Dept. Yazd University
Additional Vacuum Terminology
• Molecular Density: the number of
particles per unit volume of a gas
(particles/cm3)
– what is molecular density as you approach
an ideal vacuum?
• Mean Free Path: the average distance a
molecule of a gas can travel in a
straight line before striking another
molecule or the chamber wall
– what is the mean free path as you approach
an ideal vacuum?
Dr. G. Mirjalili, Physics Dept. Yazd University
Vacuum Terminology
• Base (Ultimate) Pressure: the lowest
pressure a vacuum system can achieve
– no gas is flowing into the system
– used at the beginning of a process to
remove impurities
– what might limit the base pressure of a
system?
• Process (Operating) Pressure: pressure
in a system with gasses flowing into it
at equilibrium
– is process pressure higher or lower than
base pressure?